This simulates an in-lens SEM configuration and dramatically improves resolution. Spatial resolution in the S-4700 FE-SEM is, at best, ~1.5 nm at specified parameters: 1 kV and 1 mm working distance ...

In the FE-SEM, a second anode is also used, placed very close to the tip. This allows for very precise accelerating voltage capacities. The combination of these two anodes determines the final ...