26-point patch plot of TSV depth variation across a 300 mm wafer. Image Credit: Bruker Nano Surfaces and Metrology Standard reflectometry techniques employ a highly concentrated laser beam to achieve ...

Another area of active research is the integration of neutron reflectometry with complementary techniques, such as X-ray scattering, atomic force microscopy, and spectroscopic methods. The combination ...

The innovative multi-angle reflectometry structure captures reflectance spectra from 400 nm to 920 nm at both normal incidence and 70°. By modifying the source and detector to extend capabilities to ...