Amid the ramp of extreme ultraviolet (EUV) lithography in the market, suppliers of EUV mask blanks are expanding their production. And a new player—Applied Materials—is looking to enter the market.

While these layers are highly reflective, some absorption still occurs, leading to a slight heating of the mask ... EUV manufacturing as well as higher yield." Corning will showcase Extreme ULE ...

“Mask repair is an essential step in the manufacturing process of extreme ultraviolet (EUV) masks. Its key challenge is to continuously improve resolution and control to enable the repair of the ...