X-ray photoelectron spectroscopy (XPS) is widely used for characterizing the uppermost 10 nm of a materials surface. Also called electron spectroscopy for chemical analysis (ESCA), the analytical ...
XPS image used to define a position for 27-μm selected area ... broad spot ion source, and glove box. Si 2p spectra acquired from a thin-film multilayer sample (courtesy of IMEC) shown in the ...
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