Accelerating 3D nanofabrication using a sensitive cationic photoresist
To speed up the TPL process, highly sensitive photoresists are essential. To date, the classic SU-8 epoxy photoresist series ...
Digi Times1d
Samsung slashes photoresist usage in 3D NAND production, impacts supplier
Samsung Electronics has reportedly reduced its use of thick photoresist (PR) in the photolithography process for its latest ...
Digi Times5d
Taiwan-made DUV photoresist likely to complete terminal production line verification by end of 2024
Although the US and Dutch governments have banned ASML from selling extreme ultraviolet (EUV) and advanced deep ultraviolet ...
Semiconductor Engineering1y
Hybrid Photoresist Capable Of High-Resolution, Positive-Tone EUVL Patterning
A technical paper titled “Vapor-Phase Infiltrated Organic–Inorganic Positive-Tone Hybrid Photoresist for Extreme UV Lithography” was published by researchers at Stony Brook University, Brookhaven ...
EurekAlert!5mon
Transparent hybrid photoresist of titanium dioxide nanoparticle-embedded acrylic resin (IMAGE)
Digital photo and scanning electron microscope of a transparent hybrid photoresist film of titanium dioxide nanoparticle-embedded acrylic resin with thickness of 29 μm Credit must be given to the ...
Nanowerk9mon
Photolithography (Optical Lithography) Explained
The process starts with the substrate being coated with a light-sensitive photoresist. A photomask, which contains the desired pattern, is then aligned above the substrate. Ultraviolet (UV) light is ...