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晶盛光子取得炉门装置及扩散炉设备专利,提升半导体产业可靠性
2025年2月3日,金融界消息,浙江晶盛光子科技有限公司再次引起了业界的关注。根据国家知识产权局的信息,该公司成功获得了一项名为“炉门装置及扩散炉设备”的专利,授权公告号为CN222418555U,申请日期为2024年5月。这项专利被广泛认为是针对半导体加工 ...
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