following which the mask must be inspected for any pattern defects that could affect the production of good microchips. For the first commercial demonstrations of EUV lithography, EUV mask ...
Companies like ASML, the Dutch firm holding a monopoly on advanced deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography machines, have been barred from selling their most sophisticated ...
The list of electronic special equipment includes deep ultraviolet (DUV) lithography equipment called "argon fluoride lithography machine," with core technical specifications of "300mm wafer ...