We employ a side-polished hollow core fiber (HCF) filled with polydimethylsiloxane (PDMS), with a 50-nm gold film coated on both HCF and PDMS. To further improve sensor performance, a 30-nm-thick ...
In this article, a flexible microelectromechanical system (MEMS) calorimetric flow sensor with high sensitivity is designed and implemented. In the sensor, polydimethylsiloxane (PDMS) is used as the ...