Japan’s JSR Corporation, the world's top photoresist manufacturer, kicked off construction of its first semiconductor photoresist factory in Cheongju, North Chungcheong Province, on Tuesday.
A technical paper titled “Vapor-Phase Infiltrated Organic–Inorganic Positive-Tone Hybrid Photoresist for Extreme UV Lithography” was published by researchers at Stony Brook University, Brookhaven ...